DLC膜のトライボロジー特性に及ぼすスパッタ前処理の影響

摘要

Diamond-like carbon (DLC) films were deposited on SKH4 steel surfaces using plasma CVD method after pre-sputtering under different sputtering conditions. These DLC films showed same properties such as hardness of 17 GPa and typical spectra of Raman analysis, regardless of the pre-sputtering conditions. But the surface roughness of these DLC films was different. A friction and wear test was conducted under dry conditions using a ball-on-plate reciprocating friction tester, and the effects of pre-sputtering conditions on tribological properties of DLC films were studied. The friction coefficient was high at the initial stage of the friction test, and then it decreased to about 0.05. The high friction time in the initial stage of DLC film with smooth surface was shorter than that of DLC film with rough surface. The surface roughness formed by the pre-sputtering affected clearly initial friction properties of DLC films. It is considered that the generation of transferred films on mating ball surfaces plays significant roles in the tribological properties of DLC films.%プラズマCVDを用いて異なる前処理条件により前rn処理を実施した後に成膜したDLC膜のトライボロrnジー特性を評価し，トライボロジー特性に及ぼす前rn処理の影響を検討した結果，次の結論を得た。rn1)前処理で生成される微細な凹凸は，DLC膜の摩rn擦初期のなじみ過程に大きな影響を及ぼすことrnが明らかとなった。