Hydrophobic properties of films grown by torch-type atmospheric pressure plasma in Ar ambient containing C6 hydrocarbon precursor

摘要

The direct deposition of polymeric films with a torch-type atmospheric pressure plasma using benzene, n-hexane and cyclohexane in Ar was performed on several substrates. The surface morphologies of the films deposited with n-hexane and cyclohexane were uniformly smooth for all deposition thicknesses, and the typical water contact angle on the films indicating the degree of hydrophobicity was about 85o. However, the films deposited using benzene had a micro-coarse surface morphology and showed a superhydrophobic property with a water contact angle exceeding 150°. Some trace of oxygen incorporation was shown in all films due to the plasma deposition process in an air ambient. The small amount of oxygenated species did not lead to a decrease of hydrophobicity of the films.