Role of Aluminum in Fabrication and Piezoresistive Effect of Silicon Carbide Ceramics

摘要

Piezoresistance coefficient was measured by changing the addition of alumina + yttria or aluminum into silicon carbide ceramics. In the case of liquid phase sintering aids (alumina + yttria), piezoresistance coefficient is almost independent of the amount of sintering aids from 1 to 20 wt/100. The piezoresistance coefficient increases with increasing the aluminum addition within its solid solution limit. Temperature dependency of piezoresistance coefficient is large in silicon carbide with large amount of aluminum addition.