Characteristics of the Fine Grained CVD Diamond Film and its Industrial Applications

摘要

A fine grained diamond film was coated onto a cemented carbide alloy by the hot filament chemical vapor deposition. The diamond grains of the film were less than 1um in diameter. The surface of the film is very smooth with a roughness value of 0.5 μm in R_(max). The surface roughness of the aluminum alloy (ADC 12) machined using an end mill coated with this fine grained diamond was 5 μm in R_(max). This is smoother than the one using commercial diamond, coarse grained, coated end mills. A semiconductor packaging tool coated with the fine grained diamond did not adhere to solder, in contrast to the conventional cemented carbide tool. The new coating also extended the tool life.