A New Three-Dimensional Profilometer for Surface Profile Measurement Using Digital Fringe Projection and Phase Shifting

摘要

The development of a three-dimensional surface profilometer using digital fringe projection technology and phase-shifting principle is presented. Accurate and high-speed three-dimensional profile measurement plays a key role in determining the success of process automation and productivity. By integrating a digital micromirror device (DMD) with the developed system, exclusive advantages in projecting flexible and accurate structured-light patterns onto the object surface to be measured can be obtained. Furthermore, the developed system consists of a specially designed micro-projecting optical unit for generating flexibly optimal structured-light to accommodate requirements in terms of measurement range and resolution. Its wide angle image detection design also improves measurement resolution for detecting deformed fringe patterns. This resolves the problem in capturing effective deformed fringe patterns for phase shifting, especially when a coaxial optical layout of a stereomicroscope is employed. Experimental results verified that the maximum error was within a reasonable range of the measured depth. The developed system and the method can provide a useful and effective tool for 3D full field surface measurement ranging from μm up to cm scale.