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New Style Thin Film Cathode Materials of Rare Earth Oxide Sintered by Spark Plasma Sintering (SPS)

机译:火花等离子体烧结(SPS)烧结稀土氧化物的新型薄膜阴极材料

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摘要

The molybdenum powder doped with rare earth oxide was processed by powder metallurgy method and a new style thin film cathode material was firstly processed by Spark Plasma Sintering (SPS) method in this paper. The secondary emission property of such kind of cathode materials were studied, the maxim secondary emission coefficient after the material was activated at 1600℃ reached to 3.84 about double that of traditional cathode materials application in magneto. The microstructure, element analysis and phase constitution of materials before and after the secondary emission property was measured were studied through SEM, ED AX and XRD. The results show that a rare earth layer about 5um thickness was created after the material was activated at 1600℃. The material grain size is about 1 um or even smaller and the distribution of elements in such materials is even.
机译:本文采用粉末冶金法对掺稀土氧化物的钼粉进行了处理,首先采用火花等离子体烧结(SPS)法对新型的薄膜阴极材料进行了处理。研究了这类阴极材料的二次发射性能,该材料在1600℃活化后的最大二次发射系数达到3.84左右,约为磁控中传统阴极材料的两倍。通过SEM,ED AX和XRD研究了材料在二次发射性能前后的微观结构,元素分析和相组成。结果表明,在1600℃活化后,形成了厚度约5um的稀土层。材料的晶粒尺寸为约1μm或什至更小,并且元素在这种材料中的分布是均匀的。

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