Molecular Dynamics Simulation of Nano-indentation of Carbon Coated Monocrystalline Silicon

摘要

This paper presents the molecular dynamics (MD) simulation of nano-indentation of diamond-like carbon (DLC) coating on silicon substrates. It is found that the mechanisms of nano-indentation of coated systems on the nanometre scale defers considerably from the same process on the micrometre scale. The coating thickness affects the mechanisms of plastic deformation both in the coating and the substrate.