Tribological Behavior of DLC Films by RF-PECVD at the Elevated Temperature

摘要

The tribological behaviors of Diamond-like carbon (DLC) films, prepared by the radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) method, were studied in the room temperature and the elevated temperature. The ball-on-disk tests with DLC films on steel specimens were conducted at a sliding speed of 60 rpm, a load of 10 N, and surrounding temperatures of 25℃ and 75℃. The results show that the coefficients of friction and the amounts of wear of DLC films were decreased at higher temperature. After tests the wear tracks of hydrogenated DLC film were analyzed by Raman spectroscopy.