Overview on Nanoimprint Technology: Process, tools, applications and technical issues for industrialization

摘要

Nanoimprint process is a simple and a low cost microano fabrication method based on mold replication principle. Various kinds of applications such as optical devices for flat panel displays or electronic papers, patterned medias, bio-medical devices and electronics devices using nanoimprint process are expected. In the past a decade, many researches and developments on the process, the tool, the application relating to nanoimprint were carried out and partly commercialized. In this paper, overview on nanoimprint technology including recent progress is described. And important issues to be solved and solution idea for industrialization of nanoimprint process are pointed out. Also, our recent R & D activities on nanoimprint tool and process, which are UV/thermal nanoimorint tool and process, roll to roll type imprint system are introduced.