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Investigation of mechanical properties and microstructure of boron films implanted by polyenergetic nitrogen ion

机译:多能氮离子注入硼薄膜的力学性能和微观结构研究

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摘要

In this paper, boron films were deposited on W6Mo5Cr4V2 high speed steel (HSS) via ion beam sputtering of boron target and implanted with polyenergetic(50 keV, 30 keV, 10 keV) nitrogen ions. The mechanical properties of the implanted layer were tested by
机译:本文通过硼靶的离子束溅射在W6Mo5Cr4V2高速钢(HSS)上沉积硼膜,并注入多能(50 keV,30 keV,10 keV)氮离子。植入层的机械性能通过

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