A Photometric Method for Measuring Photoacid Generator Efficiencies Using Rhodamine B as Acid Sensor in Thin Polymer Films

Junping Li; Weimin Zhang; Jialing Pu

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A Photometric Method for Measuring Photoacid Generator Efficiencies Using Rhodamine B as Acid Sensor in Thin Polymer Films

机译：用若丹明B作为酸传感器测量聚合物薄膜中的光致产酸剂效率的光度法

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This paper reported a novel method to measure photoinduced acid generation in polymer films, which were widely used in microlithography. The method employed Rhodamine B (RB) as acid sensor due to its changes in color and uv-vis absorbency in acidic condit

机译：本文报道了一种新的方法来测量聚合物薄膜中的光致产酸，该方法已广泛用于微光刻。该方法采用若丹明B（RB）作为酸传感器，因为它在酸性条件下会改变颜色和uv-vis吸收能力

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来源
《Key Engineering Materials》 |2008年第2008期|p.686-689|共4页
作者
Junping Li; Weimin Zhang; Jialing Pu;
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作者单位

Lab Printing & Packaging Material and Technology, Beijing Institute of Graphic Communication, No.25, Xinghua Beilu, Daxing, Beijing 102600, P. R. CHINA;

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原文格式 PDF
正文语种 eng
中图分类工程基础科学;
关键词
photoacid generator; rhodamine B; standard working curve; quantities of acid generating;

机译：光酸产生剂罗丹明B标准工作曲线产酸量;

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专利

1. Improved method for measuring photoacid generator kinetics in polymer thin films using normalized interdigitated electrode capacitance data [J] . Berger CM, Henderson CL Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures . 2004,第3期

机译：使用归一化叉指电极电容数据测量聚合物薄膜中光酸产生动力学的改进方法
2. Aromatic Monoazines as Fluorescent Sensors for Photoacid Generation in Thin Polymer Films [J] . G. Pohlers, S. Virdee, J. C. Scaiano, Chemistry of Materials . 1996,第11期

机译：芳香单嗪类作为荧光传感器，用于在聚合物薄膜中产生光酸
3. Novel polymeric nonionic photoacid generators and corresponding polymer Langmuir-Blodgett (LB) films for photopatterning [J] . Wenjian Xu, Tiesheng Li, Gaojian Li Journal of Photochemistry and Photobiology, A. Chemistry . 2011,第1期

机译：新型聚合物非离子光致产酸剂和用于光图案化的相应聚合物Langmuir-Blodgett（LB）膜
4. A Photometric Method for Measuring Photoacid Generator Efficiencies Using Rhodamine B as Acid Sensor in Thin Polymer Films [C] . Junping Li, Weimin Zhang, Jialing Pu International Conference on Surface Engineering . 2008

机译：一种光度法，用于测量使用罗丹明B作为薄聚合物膜中的酸传感器测量光酸发生器效率的方法
5. ENERGY TRANSFER AMONG FLUORESCENT MOLECULES DISPERSED IN THIN FILMS OF POLYMER OR PROTEIN (RHODAMINE B, SULFORHODAMINE 101, POLYVINYL, POLY (VINYL ALCOHOL) BOVINE SERUM ALBUMIN, TIME-CORRELATED PHOTON COUNTING, LIFETIMES). [D] . SHOOP, CHRIS EDWIN. 1985

机译：荧光分子中的能量转移分散在聚合物或蛋白质（如若丹明B，磺胺二甲酰胺101，聚乙烯醇，聚乙烯醇）牛血清蛋白，稀薄的时间相关光子计数，薄膜中。
6. Design of Iodonium Salts for UV or Near-UV LEDs for Photoacid Generator and Polymerization Purposes [O] . Ségolène Villotte, Didier Gigmes, Frédéric Dumur, 2020

机译：用于紫外或近紫外LED的碘鎓盐的设计用于光酸产生剂和聚合目的
7. Polymer-bound photobase generators and photoacid generators for pitch division lithography [O] . Younjin Cho, Xinyu Gu, Yuji Hagiwara, 2011

机译：聚合物结合的光碱基发生器和用于间距光刻的光拍发电机

A Photometric Method for Measuring Photoacid Generator Efficiencies Using Rhodamine B as Acid Sensor in Thin Polymer Films

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