Research on the Correlation between the Surface Quality and the Abrasive Grains Wear in Dual-Lapping Process of Sapphire

摘要

In order to achieve high efficiency and low damaged layer during sapphire lapping process, experimental research on the correlation between the surface quality and the abrasive grains wear in dual-lapping processing sapphire. The sapphire surface quality was characterized by roughness. Sapphire with (0001) orientation was lapped by 280~# boron carbide abrasive grits. The abrasive grains were analyzed by a laser diffraction particles size analyzer. The micro-surface uniformity and roughness were also presented by using WYKO equipment. Experimental results show that the abrasive grains size reduction was proportional to the improvement of the surface quality during the lapping, after 45min the abrasive size change tends to be uniform, the participation rate of abrasives grains in lapping process was between 0.2% and 16%. Sapphire with average roughness R_a<0.340μm, R_t<4.0μm, R_z<3.26μm, R_q<0.44μm, R_a0.523μm and R_t<6.0μm could be achieved by dual lapping processing with 280~# boron carbide grits in 120 minutes.