Laser-anneal Of Metal-based Micro Optical Scanner Derived By Aerosol Deposition

摘要

To retain the driving properties of metal-based micro optical scanner derived by aerosol deposition (AD) technique, CO_2 laser irradiation was used to anneal the PZT films deposited onto the stainless-steel substrate. Stainless-steel mirror and frame of the scanner with the film annealed by laser irradiation maintained their metallic luster. The scanner with the film annealed by laser irradiation at 600 ℃ for 1 min has a scanning angle over 30 degree that is comparable with the scanning angle of a similar scanner annealed by electric furnace at 600 ℃ for 10 min.