Design of a Fast Tool Servo based Diamond Turning Machine for Fabricating Micro-structured Surfaces

摘要

Increasing demand for ultraprecision components with micro-structured surfaces has attracted focus on diamond turning research. In this paper, a fast tool servo (FTS) based diamond turning machine is presented for fabricating micro-structured surfaces with high accuracy. A design criterion is established to serve as a guide in choosing or designing a suitable type of FTS for a micro-structured surface. Experiments on fabricating sampled micro-structured surfaces are carried out to demonstrate the effectiveness of the designed FTS based diamond turning machine.