Fabrication of ordered array of tungsten nanoparticles on anodic porous alumina by electron-beam-induced selective deposition

摘要

Using an ordered nanopore array of anodic porous alumina membrane obtained by a two-step anodization process, ordered array of tungsten nanoparticles was fabricated using an electron-beam-induced selective deposition process. The nanoparticles were preferentially formed in the pores in the electron-beam irradiated area. The microstructure and composition of as-deposited nanoparticles were characterized. The as-deposited nanoparticles contain many nanocrystallites. The nanocrystallites were identified to be the equilibrium phase of bcc structure metal W at room temperature.