Surface Roughness Measurement Using Laser Speckle Statistical Analysis

摘要

This work represents a noncontact nondestructive technique for surface roughness measurement. The technique is based on investigating the statistical properties of the speckle patterns that are developed whenever a surface is illuminated with a highly coherent light source such as a laser. The main objective is to correlate the sizes of the speckles with their light intensities to the surface roughness and profile. Different statistical approaches and correlation analysis have been implemented. Spatial data analysis, or variogram analysis, has been used to develop the relationship between observations taken at various locations. Among the other advantages of such an approach, this technique is simple to implement and suitable for operation in a manufacturing environment.