Design Simulation and Analysis of U-Shaped and Rectangular MEMS Based Triple Coupled Cantilevers

摘要

In this paper, we have proposed a new shape Micro-Electromechanical Systems (MEMS) based triple coupled Cantilever sensor, named as U-Shaped Cantilever. We have designed and simulated a U-Shaped MEMS based micro-cantilever made up of P-Silicon (Polycrystalline, Lightly doped) in COMSOL multiphysics. U-Shaped single beam Cantilever is designed with the dimensions of 100μm*20μm*2μm. U-shaped triple coupled Cantilever is designed with the dimensions of 20μm*120μm*2μm, 100μm*20μm*2μm. The simulation results like displacement, Eigen-frequency, surface stress, temperature, measurements of the U-shaped triple coupled cantilever is compared with rectangular triple coupled cantilever.