Combined 3D FE and circuit modeling of radio frequency heating systems

摘要

This paper presents a completely new approach for the modeling of radio frequency(rf)heating systems, which is based on a combined finite element and circuit model. The finite element method is used to obtain the 3D electromagnetic fields inside various applicator configurations. An investigation on the validity of electrostatic conditions inside rf applicators has shown that it is only valid for a limited number of cases, and hence the wave equation is used. The finite element model is validated using experimental measurements of the impedance of a prototype applicator. Circuit simulation techniques are used to model the combined Tank-applicator system.