Decrease in the camber degree of Au/ceramic co-fired structure for LTCC technology

摘要

To relieve the camber of Au/ceramic co-fired structure, investigation on the sintering of gold paste with different constituent material properties was performed in this study. The sintering initial temperature of gold paste was correlated with the gold particle size, the glass softening point and the glass content closely. By adjusted the gold paste sintering shrinkage behaviour the camber evolutions were obviously changed, including the camber direction and the camber degree. When glass content in gold paste was 3 wt% and the softening point was 730 °C, the Au/ceramic co-fired structure exhibited the minimum camber, of which the h_t/h_o value was 0.96. The results of this work have shown the relationship between the camber evolution of Au/ceramic structure and the sintering shrinkage behaviour of gold paste, which would give an avenue to solve camber in the LTCC application.