Micro-patterned nanoscale Au films on PMMA: fabrication and effect of PMMA dewetting on Au patterning

摘要

Patterned metallic thin films have attracted a lot of attention, in recent years, due to their wide technological applications. On the basis of this fact, in the present work, we illustrate a simple, versatile, and low-cost methodology to prepare surface micro-patterns in nanoscale deposited Au films. The methodology is based on the following steps: (a) to perform nanoscale Au film depositions assisted by micrometric templates to obtain the deposited Au film micrometric patterned in specific and desired ways (micrometric squares, hexagons, ...), and (b) by low-temperature thermal processes (＜300 ℃) to induce a dewetting process of the PMMA to guide specific patterning effects in the top nanoscale Au film. In this approach, the Au surface pattern order is established by the template confined deposition on a micrometric scale while the realization and control of the Au surface pattern is given by the control of the dewetting process of the underlaying substrate, without invoking high temperature thermal processes.