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Formation and characterization of intermetallic compounds in electroplated cobalt-tin multilayers

机译:电镀钴锡多层膜中金属间化合物的形成和表征

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摘要

Abstract Intermetallic compounds (IMC) form during the metallurgical bonding processes when the interfaces involve solid metal and molten solder. Cobalt (Co) is a promising candidate to be used as under bump metallization (UBM) material, tin (Sn)-based solder alloying element, and transient liquid phase bonding base metal. This work aims at studying the intermixing reaction in Co–Sn system from electroplated Co and Sn multilayers. Co–Sn couples were sequentially electroplated and reflowed at 400 °C for 1 and 4 h. The microstructure and composition of the phases formed at different reflow duration were characterized by field emission scanning electron microscopy (FESEM) coupled with energy dispersive X-ray spectroscopy (EDX), and X-ray diffraction (XRD). Mechanical properties of the IMC layers formed in the samples were characterized using the nanoindentation technique under quasi-static and continuous measurement modes. FESEM/EDX and XRD analysis showed a mixture of CoSn+CoSn~(2)phases was formed in the 1 h reflow sample. As reflow time was increased to 4 h, only CoSn phase was found. Pure CoSn phase exhibits high nanohardness of 9.51 GPa while the region with CoSn+CoSn~(2)phases gives nanohardness value of 6.83 GPa.
机译:摘要当界面涉及固态金属和熔融焊料时,金属间化合物(IMC)在冶金结合过程中形成。钴(Co)是一种有希望的候选材料,可用于凸点下金属化(UBM)材料,锡(Sn)基焊料合金元素和瞬态液相键合贱金属。这项工作旨在研究电镀的Co和Sn多层在Co-Sn系统中的混合反应。 Co-Sn对被依次电镀并在400°C回流1和4小时。通过场发射扫描电子显微镜(FESEM)结合能量色散X射线光谱(EDX)和X射线衍射(XRD)表征了在不同回流持续时间下形成的相的微观结构和组成。在准静态和连续测量模式下,使用纳米压痕技术表征了样品中形成的IMC层的机械性能。 FESEM / EDX和XRD分析表明在1 h回流样品中形成了CoSn + CoSn〜(2)相的混合物。随着回流时间增加到4小时,仅发现CoSn相。纯CoSn相表现出9.51 GPa的高纳米硬度,而CoSn + CoSn〜(2)相的区域给出的纳米硬度值为6.83 GPa。

著录项

  • 来源
    《Journal of materials science》 |2018年第7期|5791-5798|共8页
  • 作者单位

    Department of Mechanical Engineering, Faculty of Engineering, University of Malaya;

    Department of Mechanical Engineering, Faculty of Engineering, University of Malaya;

    Department of Mechanical Engineering, Faculty of Engineering, University of Malaya;

    Department of Mechanical Engineering, Faculty of Engineering, University of Malaya;

    Department of Mechanical Engineering, Faculty of Engineering, University of Malaya;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

  • 入库时间 2022-08-17 13:43:34

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