Fabrication of BaTiO_3-based thin film heterostructures with ring electrodes by low cost deposition techniques

摘要

In this paper the fabrication of BaTiO3-based thin film heterostructures with ring silver electrodes by low cost deposition techniques was investigated. BaTiO3, Ba1-xSrxTiO3 (x = 0.1, 0.2, 0.3, 0.4) and BaTi1-xZrxO3 (x = 0.1, 0.2) thin films for potential application in microwave technologies were prepared by chemical solution deposition method on Pt-coated silicon substrates and sintered at different temperatures. The prepared films were examined by SEM, AFM, XRD and Raman spectroscopy in order to study the influence of dopants on microstructure and phase changes. Dielectric and ferroelectric properties of the doped BaTiO3 thin films were also investigated to find the optimal composition and structure for tunable application. Complex shaped silver electrodes suitable for measurements of tunability at GHz frequencies were prepared by inkjet printing method. The electrodes with circular shape were printed on the surface of BaTiO3 based thin films by Dimatix inkjet printer. Precision limits of the method and the influence of printing conditions on electrode size and quality were also investigated.