The effects of heat-treatment temperature on LiNbO_3 thin films prepared by the polymeric precursor method were investigated. The precursor solution was deposited on Si(111) substrates by dip coating. X-ray diffraction and thermal analyses revealed that the crystallization process occurred at a low temperature (420 ℃) and led to films with no preferential orientation. High-temperature treatments promoted formation of the LiNb_3O_8 phase. Scanning electron microscopy, coupled with energy dispersive spectroscopy analyses, showed that the treatment temperature also affected the film microstructure. The surface texture—homogeneous, smooth, and pore-free at low temperature—turned into an “islandlike” microstructure for high-temperature treatments.
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