Growth of WO_3 crystals from W-Ti-O thin films

摘要

The nucleation and growth of WO_3 signle crystals induced by annealing W-Ti-O thin films deposited onto Al_2O_3 substrates has been stuided by micro-Raman spectroscoy. Amorphous W-Ti-O layers have been obtained from RF sputtering W-Ti alloy targets in a reactive atmoshpere. Annealing of these laeyrs yielded several WO_3 phase dependiong on the annealing temeprature. Ti content, and duration of the heat treatment. Moncolinic γ-WO_3 crystallites were found dispersed onto the laeyr su4rface, while in the T-rich laeyr temeplating the Al_2O_3 substrate hgiehr symmetry WO_3 phases have been identified.