Sputtering at Acute Incidence

摘要

Experimental sputtering yields obtained for incidence angles from 2° to 90° (normal) with incident ion energies of 1.5 to 30 keV are reported. These data were obtained by bombardment of copper, molybdenum, and tungsten surfaces with xenon and argon ions. Brief surveys of low‐ and high‐temperature surface effects are also reported.