Mechanical Properties of Copper Films

摘要

The mechanical properties of polycrystalline copper films, 700–5000‐Å thick, were measured using the bulge technique. The breaking strength increased with decreasing film thickness, the greatest increase occurring below 1000 Å. The equivalent bulk breaking strength was found to be 61 000 lb/in2. Young''s modulus was independent of film thickness and had the normal value 18×106 lb/in2.