Application of Monte Carlo calculations to quantitative microanalysis of alloy systems

摘要

The Monte Carlo technique based on the multiple‐scattering theory of Lewis was extended to enable the simulation of electron scattering in a compound. The accuracy of this Monte Carlo simulation was assessed by applying it to the electron probe microanalysis of CuAl and FeAl binary systems. The results were compared with those obtained by the other quantitative correction methods to conclude that this approach is comparable to the others in accuracy, and is applicable in the cases of much wider experimental conditions, e.g., tilting incidence, etc.