Nondestructive inspection of transparent microtargets for laser fusion

摘要

The method is described for the nondestructive inspection of small (≪100‐μm outside diameter) hollow thin (≪2‐μm wall thickness) transparent shells used as laser‐fusion targets. Utilizing the interference properties of light, this method enables measurements of sphericity and absolute wall thickness to accuracies better than ±10%. The equipment and calibration procedure are discussed.