Evidence of absence of electrode‐limited conduction in thin (≳140 Å) Ta2O5 films

摘要

We report room‐temperature high‐field (E≳106 V/cm) electrical conduction measurements in ’’flaw‐free’’ thin Ta2O5 films (140–2400 Å), with gold and aluminum counterelectrodes. The experimental results rule out electrode‐limited conduction even though dlogi/dV1/2 corresponds to the Schottky process.