Influencing factors and calculation of residual currents for modified metal‐oxide‐semiconductor devices covered with various silicone elastomers

摘要

An equation for the residual current induced by electric potential during charging of the gate electrode in modified transistors was derived by using electrical conductivity, Atalla’s model, and Ihantola’s equation for metal‐oxide‐semiconductor devices. The equation was examined by comparing calculated values with measured values of the residual current in a transistor covered with a silicone elastomer vulcanized by various reactions. Factors causing variations in hardness affect the electrical conductivity of the silicone elastomers. These are analyzed based on the vulcanization reaction system and the catalyst species.