Measurement of the temperature dependence of lattice deformations in silicon using Raman microscopy

摘要

The effect of heating and cooling in the range of 25-900 degrees C on the lattice deformations of diamond wire-sawn polycrystalline and scratched monocrystalline silicon surfaces was studied in detail using Raman microscopy. Mechanically treated silicon surfaces contain tensile or compressive strained silicon with varying deformation strength and areas with high-pressure silicon phases and amorphous silicon. It is shown that compressive deformed silicon relaxes after heating the sample to 600 degrees C, while tensile deformed silicon only relaxes after multiple heating and cooling cycles. Raman measurements during the heating and after the cooling phases reveal the individual thermal expansion and relaxation behavior of the deformed silicon states. Compressive deformed silicon relaxes during the heating phase, while tensile deformed silicon relaxes during the cooling phase. It is, therefore, possible to separately relax certain deformation states using thermal annealing without changing the topography of the surface.