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首页> 外文期刊>Journal of Applied Physics >Observation of increased nanostructure cone growth on Cr due to grazing-incidence Ta seed atom deposition in a He plasma
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Observation of increased nanostructure cone growth on Cr due to grazing-incidence Ta seed atom deposition in a He plasma

机译:由于氦等离子体中掠入射Ta种子原子的沉积,Cr上的纳米锥生长增加的观察

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Nanostructure cone growth on chromium during helium plasma exposure in the PISCES-A linear plasma device is found to increase with the deposition of heavy tantalum atoms. Tantalum is found to be especially effective at increasing cone growth if the tantalum is incident on the surface at a grazing angle (similar to 5 degrees or less). Tantalum atoms at grazing incidence are observed to be dominantly deposited at the cone tips, consistent with reduced sputtering of the cone tips and increased cone growth. Monte-Carlo simulations are found to be qualitatively consistent with the experimental observation that grazing-incidence heavy atom deposition on a lighter substrate will tend to increase cone growth. Published under license by AIP Publishing.
机译:发现在PISCES-A线性等离子体装置中氦气等离子体暴露期间,铬上的纳米结构锥生长随重钽原子的沉积而增加。如果钽以掠射角(大约5度或更小)入射到表面上,则发现钽在增加锥体生长方面特别有效。观察到掠入射时的钽原子主要沉积在锥尖上,这与锥尖的溅射减少和锥长增加相一致。蒙特卡洛模拟被发现与实验观察在质量上是一致的,在较轻的基底上掠入射重原子的沉积将倾向于增加锥体的生长。由AIP Publishing授权发布。

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