Investigation of incubation in ArF excimer laser irradiated poly(methyl-methacrylate) using pulsed force mode atomic force microscopy

摘要

An atomic force microscopic method to study the incubation states of UV laser irradiated polymer samples is presented. Targets were illuminated by different number of pulses at 5.8 and 8.9 mJ/cm~(2) fluences. The induced adhesive and morphological changes were investigated simultaneously by an atomic force microscope equipped with a pulsed force mode extension. Importantly, below 100 pulses morphological changes were not observable while significant changes in the adhesion were found as a result of the incubation at 8.9 mJ/cm~(2) fluence. This method allows the imaging and detection of the whole laser modified area with nanometer resolution.