Magnetic properties and microstructures of Fe-Pt thin films sputter deposited under partial nitrogen gas flow

摘要

Continuous Fe_(100-x)Pt_x thin films (x = 44, 50, 56, 60, and 65) with a thickness of around 80 nm were prepared by dc magnetron sputtering under a mixture of argon and nitrogen gases. The maximum coercivity was obtained at the Fe_(56)Pt_(44) off-stoichiometric composition after postannealing for L1_0 ordering. For the equiatomic and Pt-rich films, partial nitrogen flow during sputtering deteriorated the in-plane coercivity of the postannealed samples due to conglomeration of smaller grains and the presence of L1_2FePt_3 phase. After postannealing for L1_0 ordering, the Fe-rich films grown in argon and mixture of argon and nitrogen atmospheres are both composed of L1_0 fct phase only, and the enhancement of the degree of order and strong preferential in-plane alignment of the c axis in the presence of nitrogen causes in-plane coercivity increase. By introducing nitrogen during sputtering, an in-plane coercivity of 1303 kA/m (16.4 kOe) was obtained for the continuous Fe_(56)Pt_(44) thin film annealed at 700℃.