Magnetic property characterization of magnetite (Fe_3O_4) nanorod cores for integrated solenoid rf inductors

摘要

The on-chip magnetic solenoid inductors with Fe_3O_4 magnetite nanorod (MN) cores are fabricated and characterized up to 40 GHz. By vibrating-sample magnetometer measurements, the magnetic property of MN as a magnetic core for a solenoid inductor is investigated. In addition, high-frequency characterization with scattering parameter measurements is performed to estimate the high-frequency performance of the solenoid inductors with the MN cores.