Vector network analyzer ferromagnetic resonance of thin films on coplanar waveguides: Comparison of different evaluation methods

摘要

We have carried out two-port network analyzer ferromagnetic resonance measurements on a coplanar waveguide. We present a detailed description on how to calculate from the raw measurement data a value proportional to the complex susceptibility and permittivity of the ferromagnetic material. Necessary corrections for errors due to imprecise sample placement on the waveguide and the sample dimensions are presented. Evaluated data up to 15 GHz are provided for two model samples: a 40 nm Co_(80)Fe_(20) layer showing a large linewidth (≈900 MHz) and a 40 nm Co_(72)Fe_(18)B_(10) layer yielding a small linewidth (≈360 MHz). Using these experimental data the presented evaluation scheme based on all four scattering parameters is then compared to commonly used approximate evaluation schemes relying on only one S parameter. These approximate methods show close agreement for the ferromagnetic resonance frequencies (the relative error is below 1%). However, the resonance linewidths show a relative error that can reach 10% in comparison with the presented evaluation method.