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首页> 外文期刊>Journal of Applied Physics >Direct growth of Cd Te thick films on the Medipix2 pixel detector chip
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Direct growth of Cd Te thick films on the Medipix2 pixel detector chip

机译:在Medipix2像素检测器芯片上直接生长Cd Te厚膜

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摘要

Polycrystalline CdTe layers were directly deposited on the Medipix2 readout chip by physical vapor deposition using a Riber molecular beam epitaxy 2300. SB_2Te_3 was evaporated as backside contact material, resulting in an M-π-p diode structure comprising the pixel contact material, the intentionally undoped CdTe, and SB_2Te_3. It was possible to achieve x-ray images at 60 kVp. In addition, thermally oxidized Si wafers were coated with a comparable M-π-p structure grown under identical conditions, to investigate electrical properties of the films. The specific resistance of the layers was found to be 3.85 × 10~8 Ω cm.
机译:使用Riber分子束外延2300通过物理气相沉积将多晶CdTe层直接沉积在Medipix2读出芯片上。SB_2Te_3作为背面接触材料蒸发,从而形成包含像素接触材料的M-π-p二极管结构,有意不掺杂CdTe和SB_2Te_3。有可能获得60 kVp的X射线图像。另外,用在相同条件下生长的可比较的M-π-p结构涂覆热氧化的硅晶片,以研究膜的电性能。发现层的电阻率是3.85×10〜8Ωcm。

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  • 来源
    《Journal of Applied Physics》 |2010年第9期|p.094504.1-094504.4|共4页
  • 作者单位

    Freiburger Materialforschungszentrum der Albert-Ludwigs-Universitaet, Stefan-Meier-Str. 21, 79104 Freiburg i. Br., Germany;

    rnFreiburger Materialforschungszentrum der Albert-Ludwigs-Universitaet, Stefan-Meier-Str. 21, 79104 Freiburg i. Br., Germany;

    rnFreiburger Materialforschungszentrum der Albert-Ludwigs-Universitaet, Stefan-Meier-Str. 21, 79104 Freiburg i. Br., Germany;

    rnFreiburger Materialforschungszentrum der Albert-Ludwigs-Universitaet, Stefan-Meier-Str. 21, 79104 Freiburg i. Br., Germany;

    rnFreiburger Materialforschungszentrum der Albert-Ludwigs-Universitaet, Stefan-Meier-Str. 21, 79104 Freiburg i. Br., Germany;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
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