Control of an electrowetting-based beam deflector

摘要

We experimentally demonstrate the feasibility of a small, low-power beam deflector based on electrowetting. The beam deflector deflects light by refraction at the flat interface (meniscus) between two immiscible and density-matched liquids, namely, a nonpolar oil mixture and an aqueous salt solution. The liquids are contained in a square pyramidal frustum with electrode-covered faces. The electrodes can be separately driven by voltage sources in order to control the contact angle between the meniscus and the frustum faces. By controlling the voltage on all four electrodes, a flat meniscus is obtained that can be tilted independently in two perpendicular directions. We present a capacitance-based feedback driving scheme and demonstrate that it can be used for accurate control of the meniscus shape and tilt. Independent, continuous, and accurate beam steering through an angle of ±6° was achieved on two deflection axes.