Stereo‐Micrographs of Conductivity

摘要

The paper deals with the utilization of electron mirror microscopy for pictorial representation of the distribution of electrical conductivity. Previously described conductivity pictures obtained by this novel kind of electron microscopy have been of the normal two‐dimensional type; this paper reports three‐dimensional display of conductivity distributions. It discusses the concept of ``stereo‐micrographs of conductivity.'' It is shown that a three‐dimensional display of the conductivity distribution of thin films is possible by combining two electron mirror micrographs to a stereo‐pair. The two micrographs are distinguished solely by the amount of current passing through the specimen. As experimental evidence of the feasibility of three‐dimensional ``conductivity pictures'' a stereo‐micrograph of a test sample with artificially prepared areas of different conductivities is shown. Limitations and precautions to be observed are briefly discussed.