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CART-BPN approach for estimating cycle time in wafer fabrication

机译:CART-BPN方法估计晶圆制造中的周期时间

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Cycle-time management plays a crucial role in improving the performance of a wafer-fabrication factory, beginning with the estimation of the cycle time of each job. Although this topic has been widely investigated, several problems still need to be addressed, such as how to classify jobs suitable for the same estimation mechanism into the same group. Most existing methods classify jobs by their attributes; however, the differences between the attributes of various jobs may not be reflected in their cycle times. The biobjective nature of a classification and regression tree (CART) makes it particularly suitable for resolving this problem. However, in a CART, the cycle times of jobs of a branch are estimated with the same value, which is inexact. Hence, this study proposes a joint use of a CART and back propagation network (BPN), in which the BPN is constructed to estimate the cycle times of jobs of a branch. A real case was used to evaluate the effectiveness of the proposed methodology. The experimental results supported the superiority of the proposed methodology over existing methods. In addition, the managerial implications of the proposed methodology are also discussed.
机译:从估计每个作业的周期时间开始,周期时间管理在提高晶圆制造工厂的性能方面起着至关重要的作用。尽管已对该主题进行了广泛研究,但仍需要解决一些问题,例如如何将适合于同一估计机制的工作分类到同一组中。现有的大多数方法都按其属性对作业进行分类。但是,各种作业的属性之间的差异可能不会反映在其周期时间中。分类和回归树(CART)的双重目标特性使其特别适合解决此问题。但是,在CART中,分支的作业周期时间估计为相同的值,这是不精确的。因此,本研究提出了CART和反向传播网络(BPN)的联合使用,在该网络中,构造BPN来估计分支机构的作业周期。一个实际案例被用来评估所提出方法的有效性。实验结果支持了所提出的方法优于现有方法的优势。此外,还讨论了所提出方法的管理意义。

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