One-pod preparation of anodic porous alumina molds with tapered holes for moth-eye structures by nanoimprinting

摘要

An anodic porous alumina mold with tapered holes was formed by a one-pod preparation process. In this process, one-pod of a mixed solution containing oxalic acid and phosphoric acid was used for both anodization and pore widening. The anodization proceeded during the on state of the applied voltage, while the pore widening proceeded during the off state. The shape of the tapered holes in anodic porous alumina could be controlled by adjusting the program composed of on and off periods. Moth-eye structures were formed by nanoimprinting using the obtained molds. These moth-eye structures effectively suppressed the reflection of incident light. (C) 2019 The Japan Society of Applied Physics