Integration of Microoptics in Bio-Micro-Electro-Mechanical Systems towards Micro-Total-Analysis Systems

摘要

In this article we present how the integration of optics into bio-microsystems can significantly enhance the performance of devices. In the field of micro-electro-mechanical systems (MEMSs), the recent progress of semiconductor technologies has led to the fabrication of devices down to the biological cell scale and to the study of specimens up to the molecular level. By combining these microtools with optical detection, new fields of research have been opened. In particular optical detection performed inside micro-fluidic systems has shown to have various applications that take advantage of both fields. As a consequence a new concept of a miniature, autonomous and integrated laboratory, called a "lab-on-chip" or "micro-total-analysis system" (μ-TAS), has emerged recently. In this field, many studies have been carried out to integrate all elements for the optical detection of substances in micro-fluidic devices. An overview of this field of research gives an idea of its challenges and promises.