Detection of Femtometer Deformations of Semiconductor Devices in Operation Using an Optical Lever

摘要

The operation of an integrated circuit (IC) should cause the thermal expansion of individual semiconductor devices fabricated on the IC. However, the thermal expansion has never been detected due to its smallness. We succeeded in detecting the thermal expansion by using an optical lever and found that its size was 10~(-13) m. This technology is suitable for uses an optical IC probe and is a new method for the study of nanodevices.