Preparation and Characterization of (Ba_0.8Sr_0.2)TiO_3-Al_2O_3 Composite Oxide for Thin Film Capacitor

摘要

Barium strontium titanate—alumina composites were fabricated using a sol—gel and anodizing process for high performance thin film capacitors and the properties of the films were studied. The (Ba_0.8Sr_0.2)TiO_3 (BST) films were formed by spin coating and subsequent annealing at 150 550 °C. The respective annealed films were anodized in a neutral borate solution. The capacitance density increased with increasing annealing temperature up to 450°C but decreased at 550 °C. The capacitance density was approximately 28.46% higher with the BST coating than without the BST layer.