A simple efficient method of nanofilm-on-bulk-substrate thermal conductivity measurement using Raman thermometry

摘要

In contrast to known Raman-thermometric measurements of thermal conductivity (k) of suspended Si nano-membranes, here we apply Raman thermometry for k measurement of mono- and nanocrystalline Si films on quartz, which is important for applications in thermoelectricity and nanoelectronics. Experimentally, we measure linear dependence of the laser-induced Raman band downshift, which is proportional to the moderate heating Delta T, on the laser power P. Then we convert the downshift to Delta T and determine the ratio Delta T/P. The actual power absorbed by the film is calculated theoretically and controlled experimentally by the reflection/transmission measurement. Then we calculate Delta T-calc/P for arbitrary film k assuming diffusive phonon transport (DPT). Film k is determined from the condition Delta T/P = Delta T-calc/P. We show that this method works well for films with thickness h Lambda, where A is phonon-mean-free path, even for low-k films like nano-crystalline Si and SiGe. For h Lambda, despite ballistic phonon transport contribution, this approach works when the in-plane OPT dominates, e.g. in Si films on quartz with h = 60 nm. We also show that the influence of thermal boundary resistance on the determined k is negligible at this condition. The proposed method is simple and time efficient, as dozen of films can be examined in one hour. (C) 2018 Elsevier Ltd. All rights reserved.