Nanoelectronic Circuits

摘要

Nanotechnologies have invaded research laboratories and foundries. Fabrication and characteriza-tion tools have emerged with feature sizes 10 nm, even approaching the ultimate molecular scale, and thus exotic quantum phenomena hold dominant sway.rnMeanwhile, semi-classical device physics has invaded the upper nano scale, and successful nano-transistors, tunneling and resonant tunneling devices have been realized well below 100 nm feature size, down to 15 nm. Metal-wired nanoscale transistor circuits (nano CMOS) have been designed with traditional computer-aided design techniques. However, the lower nanoscale region is still open for engineering exploration.