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Nano and Nanocomposite Superhard Coatings of Silicon Carbonitride and Titanium Diboride by Magnetron Sputtering

机译:磁控溅射碳氮化硅和二硼化钛的纳米和纳米复合超硬涂层

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摘要

Superhard coatings (hardness > 20 GPa) are being widely researched, driven by the need to use the components under different combinations of environments. Complex properties such as low friction and low wear, increased life time, and increased toughness are required in the same coating. Nanocomposite and nanocoatings are promising materials to achieve them. In the present communication, the author presents research findings on hard nanocomposite and nanocoatings of silicon carbonitride (SiCN) and titanium diborides by magnetron sputtering on Si and steel substrates. XPS, atomic force microscopy, and nanoindentation studies on both the films showed that they possessed high hardness, modulus, and significant elastic recoveries after unloading. These properties can be attributed to nanocrystalline dispersions of carbon nitride and silicon nitride phases in the amorphous SiCN matrix in nanocomposite SiCN thin films, whereas in the case of the TiB_2 film, nanosize grains led to higher hardness.
机译:由于需要在不同环境组合下使用组件,因此对超硬涂层(硬度> 20 GPa)进行了广泛的研究。在同一涂层中需要复杂的特性,例如低摩擦和低磨损,更长的使用寿命以及更高的韧性。纳米复合材料和纳米涂料是实现它们的有前途的材料。在本通讯中,作者介绍了通过磁控溅射在硅和钢基底上形成的硬质纳米复合材料和碳氮化硅(SiCN)和二硼化钛纳米涂层的研究成果。 XPS,原子力显微镜和纳米压痕研究表明,它们在卸载后具有很高的硬度,模量和显着的弹性回复率。这些性质可归因于纳米复合SiCN薄膜中非晶SiCN基质中氮化碳和氮化硅相的纳米晶体分散体,而在TiB_2薄膜的情况下,纳米晶粒导致较高的硬度。

著录项

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  • 作者

    Suman Kumari Mishra;

  • 作者单位

    National Metallurgical Laboratory (CSIR), Jamshedpur 831007, India;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

  • 入库时间 2022-08-17 13:43:32

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