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Integrated Hardware and Software for Improved Flatness Measurement With ATC4.1 Flip-Chip Assembly Case Study

机译:借助ATC4.1倒装芯片组装来改进平面度测量的集成硬件和软件案例研究

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Over the past four decades, microelectronic packaging technology has evolved from peripheral, through-hole, and bulk configurations to area-array, surface-mount, and small-profile ones. Among these approaches, flip-chip attachment has become the most favorable choice for its large input/output capabilities and short signal path distributions. Given the prediction that the chip size and power of a single chip package will increase dramatically, substrate warpage of flip-chip packages during assembly and usage has become a major concern. Warpage could cause misalignment between the chip and the substrate, prevent the solder balls from making contact with the substrate flip-chip pads during the reflow soldering process, and induce crack nucleation at the board underfill interface during long-term usage. In this paper, the authors developed an integrated large-area shadow moire system for measuring small and large board and chip package warpage. The hardware is designed to carry out warpage measurement with a resolution on the order of micrometers. Combined with software, the integrated system is fully automated and highly accurate. For the case study, the system is used to characterize the substrate warpage of flip-chip on organic board assemblies. Warpage of substrates at the initial bare-board stage, post-reflow, and post-underfill is measured at room temperatures. It is found that by properly selecting initially warped substrates, post-reflow and post-underfill warpage can be reduced. In addition, warpage measurements at elevated temperatures during thermal cycling and power cycling show that power cycling poses a smaller impact on substrate warpage.
机译:在过去的四十年中,微电子封装技术已经从外围,通孔和批量配置演变为面阵,表面贴装和小尺寸配置。在这些方法中,倒装芯片附件已经成为其大输入/输出功能和短信号路径分布的最佳选择。考虑到单个芯片封装的芯片尺寸和功率将急剧增加的预测,倒装芯片封装在组装和使用过程中的基板翘曲已成为主要问题。翘曲可能会导致芯片与基板之间的未对准,在回流焊接过程中防止焊球与基板倒装芯片焊盘接触,并在长期使用过程中在板底部填充界面处引起裂纹成核。在本文中,作者开发了一种集成的大面积阴影波纹系统,用于测量大小板和芯片封装的翘曲。硬件被设计成以微米级的分辨率执行翘曲测量。结合软件,该集成系统是全自动且高度准确的。对于案例研究,该系统用于表征有机板组件上倒装芯片的基板翘曲。在室温下测量初始裸板阶段,回流后和底部填充后基板的翘曲。已经发现,通过适当地选择最初翘曲的基板,可以减少回流后和底部填充后的翘曲。此外,在热循环和功率循环过程中,高温下的翘曲测量结果表明,功率循环对基板翘曲的影响较小。

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