【6h】

60-GHz Full MEMS Antenna Platform Mechanically Driven by Magnetic Actuator

机译:机械驱动的60 GHz全MEMS天线平台

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摘要

This paper presents a single antenna platform steered by an external magnetic field where a monolithic microwave integrated circuit (MMIC) and capacitors are vertically integrated. Unique process skills are successfully optimized to implement a newly proposed microelectromechanical systems antenna. A silicon grid is patterned on the processing wafer to prevent the destruction of the antenna by benzocyclobutene delamination due to the stress applied to the wafers. Moreover, the stress barrier patterns are designed to increase the fabrication yield by protecting the structure failure during the back-side silicon release step. All the electrical elements, such as the MMIC, capacitors, patch antenna, and signal lines, are integrated on a single silicon chip; thus, the fabricated antenna system has smaller size and higher productivity than the conventional ones. The vertically integrated MMIC particularly results in a uniform gain at entire steering angles and reduced signal losses. The fabricated antenna is driven by a magnetic field externally applied with copper coils, and the antenna beam patterns are obtained with various tilting angles. The scanning angles are $-14^{circ}$, 0 $^{circ}$, and $+18^{circ}$ in the H-plane and $-18^{circ}$, $-12^{circ}$, 0$^{circ}$ , $+12^{circ}$, and $+16^{circ}$ in the E-plane, and the center frequency of the fabricated antenna is 59.8 GHz which is close to the designed resonance frequency of 60 GHz.
机译:本文提出了一个由外部磁场控制的单天线平台,其中垂直集成了单片微波集成电路(MMIC)和电容器。独特的工艺技能已成功优化,以实现新提出的微机电系统天线。在处理晶片上对硅栅进行构图,以防止由于施加到晶片上的应力而导致苯并环丁烯分层而破坏天线。此外,应力阻挡图案被设计为通过保护背面硅释放步骤期间的结构故障来增加制造成品率。所有的电气元件,例如MMIC,电容器,贴片天线和信号线,都集成在单个硅芯片上。因此,与常规天线系统相比,所制造的天线系统具有更小的尺寸和更高的生产率。垂直集成的MMIC特别可以在整个转向角上实现均匀的增益,并减少信号损耗。制成的天线由外部施加有铜线圈的磁场驱动,并以各种倾斜角获得天线波束方向图。扫描角度为 $-14 ^ {circ} $ ,0 $ ^ {circ} $ $ + 18 ^ {circ} $ 和<公式公式类型=“ inline”> $-18 ^ {circ} $ ,<公式Formulatype =“ inline”> < tex Notation =“ TeX”> $-12 ^ {circ} $ ,0 <公式Formulatype =“ inline”> $ ^ {circ} $ $ + 12 ^ {circ} $ $ + 16 ^ {circ} $ ,并且制造天线的中心频率为59.8 GHz,接近60 GHz的设计谐振频率。

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