フッ素添加ECRスパッタカーボン薄膜の摩擦特性

摘要

筆者らは，ECRスパッタ法によって，導電性と高い耐摩耗性を備えたフッ素添加カーボン薄膜を作製した．このフッ素添加ECRスパッタカーボン薄膜について，AFMによる表面粗さ測定，ボールオンディスク型摩擦試験機による摩擦試験を行った．その結果，表面粗さは無添加ECRスパッタカーボン薄膜と比べて変化はなかった．また，摩擦試験の結果，膜中フッ素濃度の増加に伴い摩擦係数は増加した．%Fluorine-containing carbon thin films with low resistivity and high wear durability were synthesized by electron-cyclotron-resonance (ECR) plasma sputtering with mixed sputtering gas of argon and tetrafluoromethane (CF4).. We evaluated the surface roughness, and the friction characteristics of the ECR-sputtered fluorocarbon thin films by atomic force microscopy and ball-on-disk-type friction tester, respectively. The surface roughness of the ECR-sputtered fluorocarbon films is almost same as that of the nondoped ECR-sputtered carbon films. The friction coefficient of the ECR-sputtered fluorocarbon films increased with the increase of the fluorine concentration of the films.